- PRAM 기록막용 Sb2Te3 박막의 질소 첨가에 대한 영향
- ㆍ 저자명
- 배준현,차준호,김경호,김병근,이홍림,Bae. Jun-Hyun,Cha. Jun-Ho,Kim. Kyoung-Ho,Kim. Byung-Geun,Lee. Hong-Lim
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2008년|45권 5호|pp.276-279 (4 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this research, properties of $N_2$-doped $Sb_2Te_3$ thin film were evaluated using 4-point probe, XRD and AFM. $Sb_2Te_3$ material has faster crystallization rate than $Ge_2Sb_2Te_5$, but sheet resistance difference between amorphous and crystallization state is very low. This low sheet resistance difference decreases sensing margin in reading operation at PRAM device operation. Therefore, in order to overcome this weak point, $N_2$ gas was doped on $Sb_2Te_3$ thin film. Sheet resistance difference between amorphous and crystallized state of $N_2$-doped $Sb_2Te_3$ thin film showed about $10^4$ times higher than Un-doped $Sb_2Te_3$ thin film because of the grain boundary scattering.