- 듀얼스테이지를 이용한 고정밀도의 하이브리드 밀링머신
- ㆍ 저자명
- 정병묵,여인주,고태조,이천,Chung. Byeong-Mook,Yeo. In-Joo,Ko. Tae-Jo,Lee. Cheon
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2008년|25권 7호|pp.39-46 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.