- 비점수차법을 이용한 초정밀변위측정법 연구
- ㆍ 저자명
- 이상헌,정광석,Lee. Sang-Heon,Jung. Kwang-Suk
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2008년|25권 7호|pp.87-94 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The displacement sensor using optical pickup head is presented. The measuring principle of optical pickup head in focusing direction is adopted to measure displacement. The preliminary tests were carried out to verify the feasibility of the optical pickup head as a displacement sensor and optical pickup head showed about $8;{mu}m$ measuring range and 10nm resolution. The methodology to expand measuring range is proposed and proved its validity. The proposed displacement sensors are applied to AFM(Atomic Force Microscope) probe head to measure the deflection of micro-cantilever.