- 펨토초 레이저에 의한 폴리이마이드 가공 특성
- Micromachined Properties of a polyimide by a femtosecond laser
- ㆍ 저자명
- 민철기,이만섭,Min. Chul-Ki,Lee. Man-Seop
- ㆍ 간행물명
- 한국레이저가공학회지
- ㆍ 권/호정보
- 2008년|11권 2호|pp.20-25 (6 pages)
- ㆍ 발행정보
- 한국레이저가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Polyimide is one of the useful materials in industry. The surface treatment of polyimide by a femtosecond laser can help accurate and fine fabrication of microstructure. And it can change the transmittance and reflectance of polyimide, too. We put femtosecond laser pulses on polyimide for rectangular or square type surface treaments and observe the change of transmittance and reflectance. Pulsewidth is 172 fs, laser power changes for fabrication are from 5 mW to 20 mW, and transmittance and reflectance are measured under 20m W, 300m W, and 920 mW. Pulse patterning is stable and almost no unwanted surface damage is shown. As power increases, working depth increases but working line width does not increase significantly. As speed changes, they also have same results. It shows the efficiency of a femtosecond laser is good and thermal damage is small for polyimide.