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D.C magnetron sputter법으로 증착된 TiAlN의 중간층에 따른 특성연구
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  • D.C magnetron sputter법으로 증착된 TiAlN의 중간층에 따른 특성연구
저자명
김명호,이도재,이광민,김운섭,김민기,박범수,양국현,Kim. Myoung-Ho,Lee. Doh-Jae,Lee. Kwang-Min,Kim. Woon-Sub,Kim. Min-Ki,Park. Burm-Su,Yang. Kook-Hyun
간행물명
한국재료학회지
권/호정보
2008년|18권 10호|pp.558-563 (6 pages)
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한국재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

TiAlN films were deposited on WC-5Co substrates with different buffer layers by D.C. magnetron sputtering. The films were evaluated by microstructural observations and measuring of preferred orientation, hardness value, and adhesion force. As a process variable, various buffer layers were used such as TiAlN single layer, TiAlN/TiAl, TiAlN/TiN and TiAlN/CrN. TiAlN coating layer showed columnar structures which grew up at a right angle to the substrates. The thickness of the TiAlN coating layer was about $1.8{mu}m$, which was formed for 200 minutes at $300^{circ}$. XRD analysis showed that the preferred orientation of TiAlN layer with TiN buffer layer was (111) and (200), and the specimens of TiAlN/TiAl, TiAlN/CrN, TiAlN single layer have preferred orientation of (111), respectively. TiAlN single layer and TiAlN/TiAl showed good adhesion properties, showing an over 80N adhesion force, while TiAlN/TiN film showed approximately 13N and the TiAlN/CrN was the worst case, in which the layer was destroyed because of high internal residual stress. The value of micro vickers hardness of the TiAlN single layer, TiAlN/TiAl and TiAlN/TiN layers were 2711, 2548 and 2461 Hv, respectively.