- 수치해석을 통한 SEM 챔버내의 이차전자 거동해석 및 이차전자 검출기의 최적 장착 위치 선정
- ㆍ 저자명
- 부경석,전종업,Boo. Kyeung-Seok,Jeon. Jong-Up
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2008년|17권 4호|pp.15-21 (7 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Secondary electron detectors used in scanning electron microscope accept secondary electrons emitted from the specimen and convert them to an electrical signal that, after amplification, is used to modulate the gray-level intensities on a cathode ray tube, producing an image of the specimen. In order to acquire images with good qualities, as many secondary electrons as possible should be reached to the detector. To realize this it is very important to select an appropriate mounting position and angle of the detector inside the chamber of scanning electron microscope. In this paper, a number of numerical simulations are performed to explore the relationships between detection rates of secondary electrons and the values of some parameters, such as distances between the detector and sample, relative mounting positions of scintillator positioned inside the detector with respect to detector cover, two types of mounting angles of the detector. The relationships between detection rates and applied voltages to corona ring and faraday cage, and energies of secondary electrons are investigated as well.