- 3차원 입자 모델을 이용한 마그네트론 스퍼터링 음극의 특성 분석
- ㆍ 저자명
- 주정훈,Joo. Jung-Hoon
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2008년|41권 5호|pp.205-213 (9 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and ionization. Flight path is calculated by a 4-th order Runge-Kutta method with a time step of 10 ps. Effects of electron starting position, magnetic field intensity and configuration were analyzed. For a more efficient and accurate modeling, multithreading technique is considered for multicore CPU computers. Under an assumption of cold ion approach, target erosion profiles are predicted for a flat target surface.