- 등방성 에칭용액을 이용한 다결정 실리콘의 표면조직화
- ㆍ 저자명
- 음정현,최관영,남산,최균,Eum. Jung-Hyun,Choi. Kwan-Young,Nahm. Sahn,Choi. Kyoon
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2009년|46권 6호|pp.685-688 (4 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Surface Texturing is very important process for high cell efficiency in crystalline silicon solar cell. Anisotropic texturing with an alkali etchant was known not to be able to produce uniform surface morphology in multi-crystalline silicon (mc-Si), because of its different etching rate with random crystal orientation. In order to reduce surface reflectance of mc-Si wafer, the general etching tendency was studied with HF/HN$O_3$/De-ionized Water acidic solution. And the surface structures of textured mc-Si in various HF/HN$O_3$ ratios were compared. The surface morphology and reflectance of textured silicon wafers were measured by FE-SEM and UVvisible spectrophotometer, respectively. We obtained average reflectance of $16{sim}19$% for wavelength between 400 nm and 900 nm depending on different etching conditions.