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Metrological Atomic Force Microscope Using a Large Range Scanning Dual Stage
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  • Metrological Atomic Force Microscope Using a Large Range Scanning Dual Stage
  • Metrological Atomic Force Microscope Using a Large Range Scanning Dual Stage
저자명
Kim. Jong-Ahn,Kim. Jae-Wan,Kang. Chu-Shik,Eom. Tae-Bong
간행물명
International journal of precision engineering and manufacturing
권/호정보
2009년|10권 5호|pp.11-17 (7 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We developed a metrological atomic force microscope (MAFM) using a large range scanning dual stage and evaluated the performance in the measurement of lateral dimension. AFMs are widely used in nanotechnology for very high spatial resolution, but the limitation in measurement range should be overcome to expand its application in nanometrology. Therefore, we constructed new MAFM having a large measurement of $200;mm;{ imes};200;mm$ by using a dual stage and an AFM head module. The dual stage is composed of a coarse and a fine stage to obtain large scanning range and high resolution simultaneously. Precision surfaces and PTFE sliding pads guide the motion of coarse stage, drove by a fine pitch screw and DC motors. Flexure hinges and PZT actuators are utilized for the fine stage. Multi-axis interferometers measure the five degrees of freedom motion of the dual stage for the position control and the compensation of parasitic angular motions. The vertical displacement of AFM tip is measured by a built-in capacitive sensor in the AFM head module within the range of $38;{mu}m$. The performance of the dual stage was evaluated and the expanded uncertainty (k = 2) in the measurements of 1-D displacement L was estimated as $U(L);=;sqrt{(2.8;mm)^2;+;(3.0{ imes}^{-7};{ imes};L)^2$. The relative uncertainty in pitch measurement was less than 0.02% and the improvement of accuracy was verified by comparing with other MAFM, which are mostly due to the expansion of scan range and the compensation of angular motion. To enhance the performance, we will reduce the vibration and examine the motion of stage in the vertical direction during a long range scan.