The studies on semiconductor industrial accident in korea have been focused on the frequencies of each type of safety management employee, characteristics, cause and unsafe conditions, acts and so on. Those attributes of semiconductor industrial accidents were usually analyzed independently, so that it was hard to provides a wel-developed process and systematic guidelines for efficient safety management. Therefore, there were a few studies based on comprehensive survey in terms of the shape type of safe management. The questionnaire survey carried out for the 284 workers who were responsible for safety management in center with cooperation companies in semiconductor industry factor analysis showed that there were three factors of safety management. First, investment and operation and management for accident prevention, Second, unsafe act and condition, safety management Third, general human error and behavior. The industries of respondents were correlative with three groups. Three groups showed statistically significant differences on the number of cases. Actually, the group with the larger investment and the more unsafe cause, human error of accidents prevention had a smaller causes of accident cases.