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Ti-30Ta-xZr 합금의 표면에 TiN/Ti 다층막코팅효과
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  • Ti-30Ta-xZr 합금의 표면에 TiN/Ti 다층막코팅효과
저자명
김영운,정용훈,조주영,최한철,방몽숙,Kim. Y.U.,Jeong. Y.H.,Cho. J.Y.,Choe. H.C.,Vang. M.S.
간행물명
한국표면공학회지
권/호정보
2009년|42권 4호|pp.161-168 (8 pages)
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한국표면공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Effects of TiN/Ti multilayer coating on the Ti-30Ta-xZr alloy surface were studied by using various experiments. The Ti-30Ta containing Zr (5, 10 and 15 wt%) were melted 10 times to improve chemical homogeneity by using a vacuum furnace. And then samples were homogenized for 24 hrs at $1000^{circ}C$. The specimens were prepared for TiN/Ti coating by cutting and polishing. The prepared specimens were coated with TiN/Ti multilayers by using DC magnetron sputtering method. The analyses of coated surface and coated layer were carried out by field emission scanning electron microscope(FE-SEM), EDX, and X-ray diffractometer(XRD). From the microstructure and XRD analysis of Ti-30Ta-xZr alloys, The equiaxed structure was changed to needle-like structure with increasing Zr content. And $alpha$-peak and elastic modulus increased as Zr content increased. The $alpha$ and $eta$ phase predominantly were found in the specimen containing high Zr content. According to the analysis of TiN/Ti coating layer, the surface defects and structures of Ti-30Ta-xZr were covered with TiN/Ti coating layer and surface roughness decreased.