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Angle Sensors Based on Oblique Giant Magneto Impedance Devices
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  • Angle Sensors Based on Oblique Giant Magneto Impedance Devices
  • Angle Sensors Based on Oblique Giant Magneto Impedance Devices
저자명
Kim. Do-Hun,Na. Ji-Won,Jeung. Won-Young
간행물명
Journal of magnetics
권/호정보
2009년|14권 1호|pp.42-46 (5 pages)
발행정보
한국자기학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The measurement of external magnetic field orientation using Giant Magneto Impedance (GMI) sensors has been performed. A soft magnetic alloy of $Co_{30}Fe_{34}Ni_{36}$ was electroplated on a Si wafer with a CoFeNi seed layer. V-shaped microwire patterns were formed using a conventional photolithography process. An external magnetic field was generated by a rectangular AlNiCo permanent magnet. The reference direction was defined as the external magnetic field direction oriented in the middle of 2 GMI devices. As the orientation of the magnetic field deviated from the reference direction, variation in the field component along each device introduced voltage changes. It was found that, by taking the voltage difference between the left and right arms of the Vshaped device, the nonlinearity of each device could be significantly reduced. The fabricated angle sensor had a linear range of approximately $70^{circ}$ and an overall sensitivity of approximately 10 mV.