Small RFID tag antenna were fabricated on Si substrate and their physical and electrical properties were evaluated. With decreasing the size of tag antenna on Si substrate, small SMD-type RFID tags could be fabricated, which is very useful for various applications including PCB tracking. Firstly, electromagnetic properties on tag antenna pattern were simulated with HFSS. The setup frequency was 13.56 MHz of HF-band RFID. The line-width and line-gap were modeled in the range of $50{sim}200{mu}m$. S parameters, SRF, and Q value were calculated from the model. When the line-width and line-gap were 100 urn and the loop-turn was 10, the SRF was 80 MHz and the Q value was ca. 9. When the microstrip antenna pattern of aluminum was fabricated by using DC sputtering, Vpp of ca. 1.6 V was obtained when the reader-tag distance was 40 mm.