Si wafer, which was treated with TMSP-TBA (N-trimethoxysilylpropyl-n,n,n-tri-n-butylammonium bromide), was used foF a substrate to grow a MFI membrane. Growth of membranes was conducted in various conditions such as temperature and gravity, and their structures were in detail studied with field emission scanning electron microscope and x-ray diffractometer. The structures of membranes grown on substrates were strongly dependent on growing temperature and gravity.