Pervaporation membrane for butanol separation was prepared by hybrid process. Plasma treatment of commercial poly(dimethylsiloxane) (PDMS) membrane was attempted and combination of plasma treatment and PDMS solution coating on polysulfone, poly(ether imide) supports were also performed. Plasma treatment of PDMS membrane with hexane and silane group compounds was performed to increase the hydrophobicity of the surface, which enhanced the separation factor upto 12.5 at the expense of flux decrease down to $1.15kg/m^2{cdot}hr$. Contact angle and relative sorption ratio were also related with hydrophobicity of the memrbane. Increase of PDMS prepolymer composition resulted in dense structure of coating layer with better separation factor. Effects of sequence of PDMS coating vs. plasma treatment were examined. It was found that plasma treatment with butanol and n-hexane plasma followed by PDMS coating showed better performance and vice versa for plasma treatment with hexamethyldisilane and hexamethyldisilazane.