- PZT 구동 나노 정밀도 스테이지를 위한 퍼지 제어기 개발
- ㆍ 저자명
- 하호진,정규원,Ha. Ho-Jin,Jeong. Kyu-Won
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2009년|18권 2호|pp.228-233 (6 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.