- 반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지절감에 관한 실험적 연구
- ㆍ 저자명
- 송근수,유경훈,강신영,손승우,Song. Gen-Soo,Yoo. Kyung-Hoon,Kang. Shin-Young,Son. Seung-Woo
- ㆍ 간행물명
- 설비공학논문집
- ㆍ 권/호정보
- 2009년|21권 5호|pp.273-281 (9 pages)
- ㆍ 발행정보
- 대한설비공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.