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Measurement of a Mirror Surface Topography Using 2-frame Phase-shifting Digital Interferometry
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  • Measurement of a Mirror Surface Topography Using 2-frame Phase-shifting Digital Interferometry
  • Measurement of a Mirror Surface Topography Using 2-frame Phase-shifting Digital Interferometry
저자명
Jeon. Seok-Hee,Gil. Sang-Keun
간행물명
Journal of the Optical Society of Korea
권/호정보
2009년|13권 2호|pp.245-250 (6 pages)
발행정보
한국광학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

We propose a digital holographic interference analysis method based on a 2-frame phase-shifting technique for measuring an optical mirror surface. The technique using 2-frame phase-shifting digital interferometry is more efficient than multi-frame phase-shifting techniques because the 2-frame method has the advantage of a reduced number of interferograms, and then takes less time to acquire the wanted topography information from interferograms. In this measurement system, 2-frame phase-shifting digital interferograms are acquired by moving the reference flat mirror surface, which is attached to a piezoelectric transducer, with phase step of 0 or $pi$/2 in the reference beam path. The measurements are recorded on a CCD detector. The optical interferometry is designed on the basis of polarization characteristics of a polarizing beam splitter. Therefore the noise from outside turbulence can be decreased. The proposed 2-frame algorithm uses the relative phase difference of the neighbor pixels. The experiment has been carried out on an optical mirror which flatness is less than $lambda$/4. The measurement of the optical mirror surface topography using 2-frame phase-shifting interferometry shows that the peak-to-peak value is calculated to be about $0.1779{mu}m$, the root-mean-square value is about $0.034{mu}m$. Thus, the proposed method is expected to be used in nondestructive testing of optical components.