- 입상의 이산화티타늄 박막을 이용한 수소센서
- ㆍ 저자명
- 송혜진,오동훈,정진연,웬득화,조유석,김도진,Song. Hye-Jin,Oh. Dong-Hoon,Jung. Jin-Yeun,Nguyen. Duc Hoa,Cho. You-Suk,Kim. Do-Jin
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2009년|19권 6호|pp.325-329 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Titanium dioxide thin films were fabricated as hydrogen sensors and its sensing properties were tested. The titanium was deposited on a $SiO_2$/Si substrate by the DC magnetron sputtering method and was oxidized at an optimized temperature of $850^{circ}C$ in air. The titanium film originally had smooth surface morphology, but the film agglomerated to nano-size grains when the temperature reached oxidation temperature where it formed titanium oxide with a rutile structure. The oxide thin film formed by grains of tens of nanometers size also showed many short cracks and voids between the grains. The response to 1% hydrogen gas was ${sim}2{ imes}10^6$ at the optimum sensing temperature of $200^{circ}C$, and ${sim}10^3$ at room temperature. This extremely high sensitivity of the thin film to hydrogen was due partly to the porous structure of the nano-sized sensing particles. Other sensor properties were also examined.