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PLD를 이용한 Antimony가 도핑된 p 형 ZnO 박막의 구현
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  • PLD를 이용한 Antimony가 도핑된 p 형 ZnO 박막의 구현
저자명
배기열,이동욱,이원재,배윤미,신병철,김일수,Bae. Ki-Ryeol,Lee. Dong-Wook,Lee. Won-Jae,Bae. Yun-Mi,Shin. Byoung-Chul,Kim. Il-Soo
간행물명
전기전자재료학회논문지
권/호정보
2009년|22권 10호|pp.814-820 (7 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Antimony (Sb) doped ZnO thin films (0.1 at.%) were deposited on sapphire (0001) substrates at various temperatures (200 - 600$^{circ}C$) by using pulsed laser deposition technique. All the thin films have been characterized by X-ray diffractometer, atomic force microscopy and spectrophotometer to investigate their structural, morphological and optical properties, respectively. Hall measurements were also carried out to identify the electrical properties of the thin films. These thin films were constituted in wurtzite structure with the preferential orientation of (002) diffraction plane and had as high as 80% optical transmission in the visible range. The bandgap energy also was determined by spectrophotometer which was around 3.28 eV. Hall measurements results revealed that the Sb dope ZnO thin film (0.1 at.%) grown at $500^{circ}C$ exhibited p-type conduction with a carrier concentration of $8.633 imes10^{16};cm^{-3}$, a mobility of $1.41;cm^2/V{cdot}s$ and a resistivity of $51.8;Omega{cdot}cm$. We have successfully achieved p-type conduction in antimony doped ZnO thin films with low doping level even though the electrical properties are not favorable. This paper suggests the feasibility of p-type doping with large-size-mismatched dopant by using pulsed laser deposition.