- 평판형 접촉연소식 마이크로 수소센서의 감지특성 향상
- ㆍ 저자명
- 김찬우,곽지혜,전일수,한상도,최시영,Kim. Chan-Woo,Gwak. Ji-Hye,Chun. Il-Su,Han. Sang-Do,Choi. Sie-Young
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2009년|18권 3호|pp.202-206 (5 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Flat type catalytic combustible hydrogen sensors were fabricated using platinum micro-heaters and sensing material pastes. The platinum micro-heater was formed on an alumina substrate by sputtering method. The paste for the sensing materials was prepared using ${gamma}-Al_2O_3$ 30 wt%, $SnO_2$ 35 wt%, and Pd/Pt 30 wt% and coated on the platinum micro-heater. The sensing performances were tested for the prepared sensors with different substrate sizes. The micro catalytic combustible hydrogen sensors showed quick response time, high reliability, and good selectivity against various gases(CO, $C_3H_8,;CH_4$) at low operating temperature of $156^{circ}C$.