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Manufacturing Process of Copper Micro-grooves Utilizing a Novel Optical Fiber-Based laser-induced Etching Technique
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  • Manufacturing Process of Copper Micro-grooves Utilizing a Novel Optical Fiber-Based laser-induced Etching Technique
  • Manufacturing Process of Copper Micro-grooves Utilizing a Novel Optical Fiber-Based laser-induced Etching Technique
저자명
Oh. Kwang-Hwan,Lim. Hyun-Taeck,Im. Hyun-Deok,Jeong. Sung-Ho
간행물명
International journal of precision engineering and manufacturing
권/호정보
2009년|10권 3호|pp.155-160 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A new approach for the fabrication of copper microgrooves with near triangular cross-sectional profile is introduced. For manufacturing the microgrooves, a laser-induced thermochemical etching technique based on an optical fiber as an optical waveguide and machining tool is proposed, which significantly reduced the complexity of a conventional laser etching set up. It is explained that the possible problem of fiber damage during laser etching with the proposed method can be solved by appropriately controlling the gap between the sample surface and fiber tip. The fabrication of copper microgrooves with $100{sim}300{mu}m$ in depth and $100{sim}150{mu}m$ in width is accomplished with the proposed technique. The grooves fabricated in the optimal process condition have smooth surfaces and clear edge. The angle of triangular groove is measured to be in the range of $30{sim}50$ degree and the aspect ratio of grooves is about $1{sim}2$. The overall etching results such as etch width, depth, and aspect ratio variation are reported in detail with respect to process variables.