The 2-step low temperature plasma processes (the combined carburizing and post-nitriding) offer the increase of both surface hardness and thickness of hardened layer and corrosion resistance than the individually processed low temperature nitriding and low temperature carburizing techniques. The 2-step low temperature plasma processes were carried out for improving both the surface hardness and corrosion resistance of AISI 316L stainless steel. The influence of gas compositions on the surface properties during nitriding step were investigated. The expanded austenite (${gamma}_N$) was formed on all of the treated surface. The thickness of ${gamma}_N$ and concentration of N on the surface increased with increasing both nitrogen gas and Ar gas levels in the atmosphere. The thickness of ${gamma}_N$ increased up to about $20{mu}m$ and the thickness of entire hardened layer was determined to be about $40{mu}m$. The surface hardness was independent of nitrogen and Ar gas contents and reached up to about 1200 $HV_{0.1}$ which is about 5 times higher than that of untreated sample (250 $HV_{0.1}$). The corrosion resistance in 2-step low temperature plasma processed austenitic stainless steels was also much enhanced than that in the untreated austenitic stainless steels due to a high concentration of N on the surface.