- 플라즈마 밀도와 기판의 기울임 정도에 따른 탄소나노튜브의 성장
- ㆍ 저자명
- 최은창,김경욱,홍병유,Choi. Eun-Chang,Kim. Kyung-Uk,Hong. Byung-You
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2009년|22권 7호|pp.612-615 (4 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We need to control the growth orientation of CNTs on a substrate for applications to various electric devices. Generally, the flow direction of feed gases and electric field between two electrode affect to growth orientations of CNTs. In this paper, we varied tilt degrees $(0^{circ},;20^{circ},;35^{circ},;50^{circ},;65^{circ},;90^{circ})$ of substrates on a cathode and DC bias voltages (0, 500, 700 V) applied between two electrodes in order to change growth orientations of CNTs. We confirmed that tilt degrees of the substrate and variation of DC bias voltages affected to the shape and orientation of the grown CNTs on the substrate.