Yield is a very important measure that can expresses simply for productivity and performance of company. So, yield is used widely in many industries nowadays. With the development of the information technology and online based real-time process monitoring technology, many industries operate the production lines that are developed into automation system. In these production lines, the product structures are very complexity and variety. So, there are many multi-variate processes that need to be monitored with many quality characteristics and associated process variables at the same time. These situations have made it possible to obtain super-large manufacturing process data sets. However, there are many difficulties with finding the cause of process variation or useful information in the high capacity database. In order to solve this problem, neural networks technique is a favorite technique that predicts the yield of process for process control. This paper uses a neural networks technique for improvement and maintenance of yield in manufacturing process. The purpose of this paper is to model the prediction of a sub process that has much effect to improve yields in total manufacturing process and the prediction of adjustment values of this sub process. These informations feedback into the process and the process is adjusted. Also, we show that the proposed model is useful to the manufacturing process through the case study.