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Transparent Phosphorus Doped ZnO Ohmic Contact to GaN Based LED
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  • Transparent Phosphorus Doped ZnO Ohmic Contact to GaN Based LED
  • Transparent Phosphorus Doped ZnO Ohmic Contact to GaN Based LED
저자명
Lim. Jae-Hong,Park. Seong-Ju
간행물명
한국재료학회지
권/호정보
2009년|19권 8호|pp.417-420 (4 pages)
발행정보
한국재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This study develops a highly transparent ohmic contact using phosphorus doped ZnO with current spreading for p-GaN to increase the optical output power of nitride-based light-emitting diodes (LEDs). The phosphorus doped ZnO transparent ohmic contact layer was prepared by radio frequency magnetron sputtering with post-deposition annealing. The transmittance of the phosphorus doped ZnO exceeds 90% in the region of 440 nm to 500 nm. The specific contact resistance of the phosphorus doped ZnO on p-GaN was determined to be $7.82{ imes}10^{-3}{Omega}{cdot}cm^2$ after annealing at $700^{circ}C$. GaN LED chips with dimensions of $300 imes300{mu}m$ fabricated with the phosphorus doped ZnO transparent ohmic contact were developed and produced a 2.7 V increase in forward voltage under a nominal forward current of 20 mA compared to GaN LED with Ni/Au Ohmic contact. However, the output power increased by 25% at the injection current of 20 mA compared to GaN LED with the Ni/Au contact scheme.