The goal of this research is to develop a multi-functional ultra precision machine to generate micro features on large surfaces. Design and characteristic analyses of our machine are presented. The analyses include its structural analysis and accuracy tests. Each axis of the developed machine was corrected and/or compensated from accuracy tests enough to generate grooves on work pieces with a less than $10{mu}m$ pitch size. After compensation, the 2-dimension position error between X-axis and Y-axis was reduced to $1.4{mu}m$ for a $400{ imes}400mm^2$ surface. From a 24 hours relative thermal displacement test between Y-axis and Z-axis, the machine showed a stable thermal displacement which was measured to be less than $1{mu}m$. From groove machining tests, our machine could successfully generate $5{mu}m$ and $10{mu}m$ pitch grooves and showed a stable micro machining characteristics. From this research, we can conclude that the developed machine has mechanical characteristics enough to generate less than $10{mu}m$ pitch grooves on a $400{ imes}400mm^2$ surface.