- 전자현미경의 이미지 향상을 위한 주사시스템의 안정성
- ㆍ 저자명
- 김승재,김동환,Kim. Seung-Jae,Kim. Dong-Hwan
- ㆍ 간행물명
- 한국공작기계학회지
- ㆍ 권/호정보
- 2009년|18권 5호|pp.455-461 (7 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In a scanning electron microscopy, image distortion is a critical issue and it is needed to be eliminated by some kinds of schemes. In this work, scanning frequency and scanning wave form are adjusted to have an improved image. The relationship between scan coil and its driver is investigated and appropriate frequency and wave form are suggested. It is proved that the selected frequency and wave form showed an enhanced image with less distortion, which were done by experiments. In addition, a noise elimination is addressed, providing improved image with a GROUND signal integration with the amplifier and the scan driver.