- 유한요소해석과 광선추적을 연계한 주사전자 현미경 대물렌즈의 설계 및 해석
- ㆍ 저자명
- 박근,이재진,박만진,김동환,장동영,Park. Keun,Lee. Jae-Jin,Park. Man-Jin,Kim. Dong-Hwan,Jang. Dong-Young
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2009년|26권 11호|pp.92-98 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The scanning electron microscope (SEM) contains an electron optical system in which electrons are emitted and moved to form a focused beam, and generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present study covers the design and analysis of an objective lens for a thermionic SEM. A finite element (FE) analysis for the objective lens is performed to analyze its magnetic characteristics for various lens designs. Relevant beam trajectories are also investigated by tracing the ray path of the electron beams under the magnetic fields inside the objective lens.