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Nb SQUID가 탑재된 초고감도 캔티레버 제작
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  • Nb SQUID가 탑재된 초고감도 캔티레버 제작
  • Fabrication of Nb SQUID on an Ultra-sensitive Cantilever
저자명
김윤원,이순걸,최재혁,Kim. Yun-Won,Lee. Soon-Gul,Choi. Jae-Hyuk
간행물명
Progress in superconductivity
권/호정보
2009년|11권 1호|pp.36-41 (6 pages)
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한국초전도학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Superconducting quantum phenomena are getting attention from the field of metrology area. Following its first successful application of Josephson effect to voltage standard, piconewton force standard was suggested as a candidate for the next application of superconducting quantum effects in metrology. It is predicted that a micron-sized superconducting Nb ring in a strong magnetic field gradient generates a quantized force of the order of sub-piconewtons. In this work, we studied the design and fabrication of Nb superconducting quantum interference device (SQUID) on an ultra-thin silicon cantilever. The Nb SQUID and electrodes were structured on a silicon-on-insulator (SOI) wafer by dc magnetron sputtering and lift-off lithography. Using the resulting SOI wafer, we fabricated V-shaped and parallel-beam cantilevers, each with a $30-{mu}m$-wide paddle; the length, width, and thickness of each cantilever arm were typically $440{mu}m,;4.5{mu}m$, and $0.34{mu}m$, respectively. However, the cantilevers underwent bending, a technical difficulty commonly encountered during the fabrication of electrical circuits on ultra-soft mechanical substrates. In order to circumvent this difficulty, we controlled the Ar pressure during Nb sputtering to minimize the intrinsic stress in the Nb film and studied the effect of residual stress on the resultant device.