- 자기정렬 구조를 갖는 VGA급 볼로미터의 성능 모델링
- ㆍ 저자명
- 박승만,Park. Seung-Man
- ㆍ 간행물명
- 전기학회논문지. The Transactions of the Korean Institute of Electrical Engineers. P
- ㆍ 권/호정보
- 2010년|59권 4호|pp.450-455 (6 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The performance modeling of a $25{mu}m$ pitch VGA ${mu}$-bolometer with the self-aligned thermal resistor structure is carried out. The self-aligned thermal resistor can be utilized for the maximizing the thermal resistance and the fill factor of a bolometer, so the performance improvement can be expected. From the results of the performance modeling of the micro-bolometer with self-align thermal resistor for a $25{mu}m$ pitch $640{ imes}480$ microbolometer designed with $0.6{mu}m$ minimum feature size, the drastic improvements of NETD from 38.7 mK to 19.1 mK, responsivity of 1.9 times are expected with a self aligned thermal resistor structure. The main reason for the performance improvements with a self-aligned thermal resistor structure comes from the increasement of the thermal resistance.