A series of new dielectric polymers with phenyl, epoxy, and carboxylicacid functional groups was prepared via free-radical polymerization. The effect of such dielectric polymers with various functional groups on the performance of OTFT was investigated. The nonpolar groups of terpolymer made the surface of the dielectric layer more hydrophobic and improved the crystal growth of pentacene on the gate insulator, resulting in higher mobility. By controlling the functional group, the electric characteristics of OTFT performance was varied, with $0.00017-0.15;cm^2/V{cdot}s$ mobility.