Enhance signal-to-noise ratio, slow positron coincidence Doppler Broadening method has been applied to study of characteristics of $Nb_3Ge$ superconductor film, which were performed from 20 K to 300 K sample temperature near Tc of it. In this investigation the numerical analysis of the Doppler spectra was employed to the determination of the shape parameter, S, defined as the ratio between the amount of counts in a central portion of the spectrum and the total counts of whole spectrum. The S-parameter values between 0.598 and 0.594 were decreased while the temperature were decreasing, that indicated the voids into the samples. The temperature dependence came from specific positron trapping rate into the vacancy-type defects. It is believed that the positrons annihilate with normal-electrons instead of super-electrons in the Nb3Ge superconductor.