Leak detection technology is a challenging research until nowadays, because it has wide and various applications in industry. Furthermore pneumatic component reliability test based on ISO requires air leakage measurement. The conventional measurement methods need a complex operation and the calibration of leak detector. Tracing the history of our study, we proposed a new method for measurement of leak flow rate using isothermal chamber. In this study, propose a simulation model of isothermal chamber by infinitesimal flow -rate, such as a leak flow-rate. The effectiveness of the proposed simulation model is proved by simulation and experimental results. Base on the comparison results, proposed simulation model is good agreement with experimental results.