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펄스 레이저 증착법으로 제작된 Bi2O3-MgO-ZnO-Nb2O5 박막의 제작 및 특성 분석
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  • 펄스 레이저 증착법으로 제작된 Bi2O3-MgO-ZnO-Nb2O5 박막의 제작 및 특성 분석
저자명
배기열,이동욱,이원재,배윤미,신병철,윤순길,Bae. Ki-Ryeol,Lee. Dong-Wook,Lee. Won-Jae,Bae. Yun-Mi,Shin. Byoung-Chul,Yoon. Soon-Gil
간행물명
전기전자재료학회논문지
권/호정보
2010년|23권 3호|pp.211-215 (5 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Pulsed laser deposition is a very efficient technique for fabricating thin films of complex compounds. In the present work, $Bi_2O_3$-MgO-ZnO-$Nb_2O_5$ (BMZN) pyrochlore thin films were deposited on platinized Si substrates at various temperatures by using pulsed laser deposition technique. These films have been characterized by X-ray diffractometer (XRD), atomic force microscopy (AFM) to investigate their structural, morphological properties. MIM structure was manufactured to analyze di-electrical properties of BMZN thin films. XRD results reveal the thin films deposited at less than $400^{circ}C$ show only amorphous phase, the crystallized thin films was observed when the thin films were prepared temperature at above $500^{circ}C$. From AFM, it was known that the thin film grown at $400^{circ}C$ is the densest. Dielectric constant increased with increasing temperature up to $400^{circ}C$ at 100 kHz and dramatically decreased at the higher temperature. A aspect of dissipation factor was the exact opposite of dielectric constant. BMZN thin films grown at $400^{circ}C$ exhibited a high dielectric constant of 60.9, a low dissipation factor of 0.007 at 100 kHz.