- 다중노광 나노구 리소그라피를 이용한 쌍-광자결정 어레이 제작
- ㆍ 저자명
- 여종빈,한광민,이현용,Yeo. Jong-Bin,Han. Gwang-Min,Lee. Hyun-Yong
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2010년|23권 3호|pp.245-249 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Two dimensional(2D) pair-photonic crystals (pair-PCs) have been fabricated by a multiple-exposure nanosphere lithography (MENSL) method using the self-assembled nanospheres as lens-mask patterns and the collimated laser beam as a multiple-exposing source. The arrays of the 2D pair-PCs exhibited variable lattice structures and shape the control of rotating angle (${Theta}$), tilting angle (${gamma}$) and the exposure conditions. In addition, the base period or filling factor of pair-PCs as well as their shapes could be changed by experimental conditions and nanosphere size. A 1.18-${mu}m$-thick resist was spincoated on Si substrate and the multiple exposure was carried out at change of ${gamma}$ and ${Theta}$. Images of prepared 2D pair-PCs were observed by SEM. We believe that the MENSL method is a suitable useful tool to realize the pair-periodic arrays of large area.