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Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor
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  • Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor
  • Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor
저자명
Hur. Shin,Lee. S.Q.,Choi. H.S.
간행물명
Journal of mechanical science and technology
권/호정보
2010년|24권 1호|pp.181-184 (4 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are $200;{mu}m$ and $10;{mu}m$, respectively. Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a cochlear-like acoustic sensor.