- 금속 촉매가 ZnO 박막을 감지물질로 이용한 NO 센서의 특성에 미치는 영향
- ㆍ 저자명
- 정귀상,정재민,Chung. Gwiy-Sang,Jeong. Jae-Min
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2010년|19권 1호|pp.58-61 (4 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper describes the fabrication and characteristics of NO sensor using ZnO thin film by RF magnetron sputter system. The sensitivity, working temperature, and response time of sputtered pure ZnO thin film and added catalysts such as Pt, Pd, Al, Ti on those films were measured and analyzed. The sensitivity of pure ZnO thin film at working temperature of $300^{circ}C$ is 0.875 in NO gas concentration of 0.046 ppm. At same volume of the gas in chamber, measuring sensitivity of 1.87 at $250^{circ}C$ was the case of Pt/ZnO thin film. The ZnO thin films added with catalyst materials were showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film.