- SBN 박막의 열처리온도에 따른 전기적인 특성
- ㆍ 저자명
- 김진사,Kim. Jin-Sa
- ㆍ 간행물명
- 전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers
- ㆍ 권/호정보
- 2010년|59권 6호|pp.1083-1086 (4 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The $Sr_{0.7}Bi_{2.3}Nb_2O_9$ thin films were deposited on Si substrate using RF magnetron sputtering method. And the SBN thin films were annealed at 650~800$[^{circ}C$]. The surface rougness showed about 0.42[nm] in annealed thin film at $650[^{circ}C$]. The dielectric constant(150) of SBN thin film was obtained by annealing temperature above $700[^{circ}C$]. The voltage dependence of dielectric loss showed a value within 0.02 in voltage ranges of -10~+10[V]. The dielectric constant characteristics showed a stable value with the increase of frequency. Also, the SBN thin films annealed at $750[^{circ}C$] showed a fatigue-free characteristics up to $1.0 imes10^8$ cycles.