New low temperature synthesis of germanium nanoparticles obtained from the reaction of germanium tetrachloride and sodium/benzophenonewere developed. These germanium nanoparticles terminated with chloride group were oxidized in air to give hydroxy-terminated germanium nanoparticles. Germanium nanoparticle containing 20(S)-camptothecin (CPT) for a noble drug delivery system were developed. FT-IR spectroscopy was used for the characterization of vibrational absorption for the germanium nanoparticle and oxidized germanium nanoparticles containing camptothecin. Electronic absorption and fluorescence properties were measured with UV-Vis and fluorescence spectrometer. The morphology of oxidized germanium nanoparticles containing camptothecin was investigated by using TEM.