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Investigation of Relationship between Etch Current and Morphology and Porosity of Porous Silicon
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  • Investigation of Relationship between Etch Current and Morphology and Porosity of Porous Silicon
  • Investigation of Relationship between Etch Current and Morphology and Porosity of Porous Silicon
저자명
장승현,Jang. Seunghyun
간행물명
조선자연과학논문집
권/호정보
2010년|3권 4호|pp.210-214 (5 pages)
발행정보
조선대학교 기초과학연구원
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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Relationship between etch current and morphology and porosity of porous silicon (PS) has been investigated. The gravimetric method is applied to measured the porosity of PS. As the current density increase, the silicon dissolution rate increases, resulting in a higher porosity and etching rate. The result shows that linear dependence of PS porosity and etching rate as a function of current density. The morphology of porous silicon was investigated by using cold field emission scanning electron micrograph (FE-SEM). The size of pores formed during anodization is predominantly controlled by the current density, with an increase in the pore size corresponding to an increase in the current density.