The inner structure of the triangular separate bar (TSB) was improved to enhance the productivity of the TSB flow meter by simplifying the machining process for making the flow meter. The cross section of upstream and downstream pressure chamber in the TSB was changed from triangle to circle, which make it possible to substitute the wire cutting by drilling in the process of machining the pressure chamber. The flow rate characteristics of the flow meters was calibrated with a laminar flow meter. Six kinds of flow meters whose diameters of pressure tap for measuring pressure of both upsteam and downstream pressure chamber were different one another were made. The effects of the pressure tap diameter on the flow rate characteristics of the TSB flow meter was little. The mass flow rate characteristics of the flow meters with increasing a non-dimensional parameter which includes the gas temperature, exhaust gas pressure and differential pressure at the flow meters and atmospheric pressure shows nearly linear relationship with a correlation coefficient of R=0.998.