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Characterization and Application of DLC Films Produced by New Combined PVD-CVD Technique
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  • Characterization and Application of DLC Films Produced by New Combined PVD-CVD Technique
  • Characterization and Application of DLC Films Produced by New Combined PVD-CVD Technique
저자명
Chekan. N.M.,Kim. S.W.,Akula. I.P.,Jhee. T.G.
간행물명
열처리공학회지
권/호정보
2010년|23권 2호|pp.75-82 (8 pages)
발행정보
한국열처리공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A new advanced combined PVD/CVD technique of DLC film deposition has been developed. Deposition of a DLC film was carried out using a pulsed carbon arc discharge in vapor hydrocarbon atmosphere. The arc plasma enhancing CVD process promotes dramatic increase in the deposition rate and decrease of compressive stress as well as improvement of film thickness uniformity compared to that obtained with a single PVD pulsed arc process. The optical spectroscopy investigation reveals great increase in radiating components of $C_2$ Swan system molecular bands due to acetylene molecules decomposition. AFM, Raman spectroscopy, XPS and nano-indentation were used to characterize DLC films. The method ensures obtaining a new superhard DLC nano-material for deposition of protective coatings onto various industrial products including those used in medicine.