Recently applications of RFID technologies in production and logistics systems are expanding. In this research, we deal with workflow modeling methods for handling RFID-tagged parts. We verified that the material flow processes in a RFID system can be designed and assessed using workflow modeling notations, and suggested available process patterns using BPMN. In addition, we proposed an algorithm to monitor the exact status of flows and determine whether some of the events are ghost reads or not by referring predefined workflow definitions. The major contribution of this research is that it has demonstrated how well-established workflow modeling methods can be applied to RFID-based systems.