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Dependence of Dielectric Layer and Electrolyte on the Driving Performance of Electrowetting-Based Liquid Lens
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  • Dependence of Dielectric Layer and Electrolyte on the Driving Performance of Electrowetting-Based Liquid Lens
  • Dependence of Dielectric Layer and Electrolyte on the Driving Performance of Electrowetting-Based Liquid Lens
저자명
Lee. June-Kyoo,Park. Kyung-Woo,Kim. Hak-Rin,Kong. Seong-Ho
간행물명
Journal of information display
권/호정보
2010년|11권 2호|pp.84-90 (7 pages)
발행정보
한국정보디스플레이학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper presents the effects of a dielectric layer and an electrolyte on the driving performance of an electrowetting on dielectric (EWOD)-based liquid lens. The range of tunable focal length of the EWOD-based liquid lens was highly dependent on the conditions of the dielectric layer, which included an inorganic oxide layer and an organic hydrophobic layer. Moreover, experiments on the physical and optical durability of electrolyte by varying temperature conditions, were conducted and their results were discussed. Finally, the lens with a truncated-pyramid silicon cavity having a sidewall dielectrics and electrode was fabricated by anisotropic etching and other micro-electromechanical systems (MEMS) technologies in order to demonstrate its performance. The lens with $0.6-{mu}m$-thick $SiO_2$ layer and 10 wt% LiCl-electrolyte exhibited brilliant focal-length tunability from infinity to 3.19 mm.