This paper describes a new computer-aided engineering system for multidisciplinary structural design. An automatic finite element mesh generation technique, based on fuzzy knowledge processing and computational geometry, is incorporated into the system, together with one of the commercial finite element analysis codes. A bubble is generated if its distance from existing bubble points is similar to the bubble-spacing function at the point The bubble-spacing function is well controlled by fuzzy knowledge processing. The Delaunay method is employed as a basic tool for element generation. Automatic finite element generation for three-dimensional MEMS holds great benefits for analyses. An optimum design solution or satisfactory solutions will be automatically searched using the genetic algorithms modified for real search space, together with the automated finite element analysis system. A novel CAE system was developed, and successfully applied to the shape design of a micro accelerometer based on a tunneling current concept.