In this paper, polyimide (PI) surface was modified by UV Laser with a low laser fluence and investigated changes of surface geometry and chemical characteristics by SEM (scanning electron microscope), X-ray diffraction (XRD), XPS (x-ray photoelectron spectroscopy) and the measurements of contact angle of water. PI surface was peeled off and modified with microstructure fabrications by photochemical ablation over the laser fluence of 50 mJ/cm2. As laser fluence increased, delamination of PI surface was occurred largely and strongly. In chemical characteristics, the O/C and N/C atomic ratios increased and contact angle decreased from $80^{circ}$ to $40^{circ}$.