- 습식식각 방법으로 제작한 패턴 형성 사파이어 기판을 가지는 GaN계 청색 LED
- ㆍ 저자명
- 김도형,이용곤,유순재,Kim. Do-Hyung,Yi. Yong-Gon,Yu. Soon-Jae
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2011년|24권 1호|pp.7-11 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Sapphire substrate was patterned by a selective chemical wet etching technique, and GaN/InGaN structures were grown on this substrate by MOVPE (Metal Organic Vapor Phase Epitaxy). The surface of grown GaN on patterned sapphire substrate (PSS) has good morphology and uniformity. The patterned sapphire substrate LED showed better light output than conventional LED that improvement 50%. We think these results come from enhancement of internal quantum efficiency by decrease of threading dislocation and increase of light extraction efficiency. Also these LED showed more uniform emission distribution in angle than conventional LED.