- 정전기력으로 구동되는 마이크로 캔틸레버 질량 센서의 제작과 특성
- ㆍ 저자명
- 이정철,최범규,Lee. Jung-Chul,Choi. Bum-Kyoo
- ㆍ 간행물명
- Journal of sensor science and technology
- ㆍ 권/호정보
- 2011년|20권 1호|pp.40-45 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a $40;{mu}m$ long, $7;{mu}m$ wide, and $3;{mu}m$ thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.