- Thermal NIL 용 스탬프 공정 수명에 관한 연구
- ㆍ 저자명
- 조천수,이문재,오지인,임오강,정명영,Cho. Cheon-Soo,Lee. Moon-Jae,Oh. Ji-In,Lim. O-Kaung,Jeong. Myung-Yung
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2011년|28권 2호|pp.239-244 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Nano Imprint Lithography(NIL) is technique for copying a pattern from stamp with nano size pattern in order to replicated the materials. It is very important to demold in order to make NIL process effectively. Self Assembled Monolayers(SAM) coater is manufactured by means of decreasing surface energy with the stamp surface treatment to improve release characteristics. Manufactured device contains tilting and rotation option for increasing process life time by coating on the sidewall of the pattern in stamp. The stamp coated with optimized tilting angle $30^{circ}$ and rotation speed of 10rpm has more imprinting cycles than the stamping coated without tilting and rotation. Effective SAM coating on the sidewall of the pattern in stamp will improve by 50% of process life time.